![Low Equivalent Oxide Thickness and Leakage Current of pGe MOS Device by Removing Low Oxidation State in GeOx With H2 Plasma Treatment | Semantic Scholar Low Equivalent Oxide Thickness and Leakage Current of pGe MOS Device by Removing Low Oxidation State in GeOx With H2 Plasma Treatment | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/6d4d783a3a176210e547c38adc262ebdc910c682/2-Figure2-1.png)
Low Equivalent Oxide Thickness and Leakage Current of pGe MOS Device by Removing Low Oxidation State in GeOx With H2 Plasma Treatment | Semantic Scholar
![Low Equivalent Oxide Thickness and Leakage Current of pGe MOS Device by Removing Low Oxidation State in GeOx With H2 Plasma Treatment | Semantic Scholar Low Equivalent Oxide Thickness and Leakage Current of pGe MOS Device by Removing Low Oxidation State in GeOx With H2 Plasma Treatment | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/6d4d783a3a176210e547c38adc262ebdc910c682/2-Figure1-1.png)
Low Equivalent Oxide Thickness and Leakage Current of pGe MOS Device by Removing Low Oxidation State in GeOx With H2 Plasma Treatment | Semantic Scholar
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